Sublimation pump and method

摘要

A vacuum pump may comprise a grating, and a sublimation element. The grating may have a grating opening and a grating interior that may be bounded by at least one grating surface. The sublimation element may be located within the grating interior and may be configured to sublimate and form a reactive film on the grating interior upon heating of the sublimation element above the sublimation temperature. The reactive film may be effective to capture gas molecules entering the grating interior through the grating opening and contacting the reactive film.

主权项

1. A vacuum pump, comprising:
a grating mounted in spaced relation to a circumference of a moving element and having a grating opening and a grating interior bounded by at least one grating surface, the grating opening facing toward a direction of circumferential movement of an outer surface of the moving element; and a sublimation element located within the grating interior and being configured to sublimate and form a reactive film on the grating interior upon heating of the sublimation element above a sublimation temperature; the reactive film being effective to capture gas molecules entering the grating interior through the grating opening in response to the gas molecules contacting the moving element.