CHAMBER FOR SCRUBBER APPARATUS

摘要

The present invention relates to a chamber for a scrubber apparatus wherein corrosion is prevented by forming a Nix coating layer or a PI coating layer on the surface of the chamber, and pinholes not formed as before and the entire surface uniformly coated as the Nix coating layer or the PI coating layer is formed via vapor deposition. The chamber for a scrubber apparatus comprises: an organic compound monomer deposited on the surface of the chamber for a scrubber apparatus; a polyimide coating layer applied to the surface of the chamber for a scrubber apparatus after the deposition; and a Nix coating layer applied to the surface of the polyimide coating layer.