发明名称 AN APPARATUS FOR THREE DIMENSIONAL THERMAL IMAGE MEASUREMENT AND A METHOD THEREOF
摘要 <p>The present invention relates to an apparatus for three-dimensional thermal image measurement and a method thereof, and more specifically, to a three-dimensional thermal image measurement and a method thereof which can find a process where an issue has occurred by outputting a three-dimensional thermal image of a subject to be measured and identifying the depth of a defect formed on the subject.</p>
申请公布号 KR101528200(B1) 申请公布日期 2015.06.12
申请号 KR20140192856 申请日期 2014.12.30
申请人 KOREA BASIC SCIENCE INSTITUTE 发明人 KIM, GHI SEOK;LEE, KYE SUNG;HUR, HWAN;KIM, GEON HEE;NAM, KI HWAN;SUNG, HA YEONG;KIM, SEON JIN
分类号 G01N25/72;G01J5/48;G01N25/20;H01L21/66 主分类号 G01N25/72
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