发明名称 |
FABRICATION METHOD OF FLEXIBLE CZTS FILMS AND ITS APPLICATION TO THIN FILM SOLAR CELLS AND THIN FILM SOLAR CELLS |
摘要 |
<p>The present invention relates to a method for manufacturing a CZTS thin film with flexibility, a method for manufacturing a thin film solar cell using the same, and the thin film solar cell, capable of reducing processing costs by forming the CZTS thin film with a CZTS single target through a single sputtering process and being used in various fields. The method for manufacturing the CZTS thin film with the flexibility according to the present invention includes a substrate receiving step of receiving a flexible substrate in a sputtering device and a CZTS thin film depositing step of depositing a CZTS thin film on the flexible substrate by sputtering the CZTS single target through the single sputtering process.</p> |
申请公布号 |
KR20150064930(A) |
申请公布日期 |
2015.06.12 |
申请号 |
KR20130149860 |
申请日期 |
2013.12.04 |
申请人 |
KOREA INSTITUTE OF INDUSTRIAL TECHNOLOGY |
发明人 |
KIM, TAE WON;PARK, JAE CHEOL |
分类号 |
H01L31/04;H01L31/18 |
主分类号 |
H01L31/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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