发明名称 FABRICATION METHOD OF FLEXIBLE CZTS FILMS AND ITS APPLICATION TO THIN FILM SOLAR CELLS AND THIN FILM SOLAR CELLS
摘要 <p>The present invention relates to a method for manufacturing a CZTS thin film with flexibility, a method for manufacturing a thin film solar cell using the same, and the thin film solar cell, capable of reducing processing costs by forming the CZTS thin film with a CZTS single target through a single sputtering process and being used in various fields. The method for manufacturing the CZTS thin film with the flexibility according to the present invention includes a substrate receiving step of receiving a flexible substrate in a sputtering device and a CZTS thin film depositing step of depositing a CZTS thin film on the flexible substrate by sputtering the CZTS single target through the single sputtering process.</p>
申请公布号 KR20150064930(A) 申请公布日期 2015.06.12
申请号 KR20130149860 申请日期 2013.12.04
申请人 KOREA INSTITUTE OF INDUSTRIAL TECHNOLOGY 发明人 KIM, TAE WON;PARK, JAE CHEOL
分类号 H01L31/04;H01L31/18 主分类号 H01L31/04
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