发明名称 FILM FOR SEMICONDUCTOR DEVICE PRODUCTION, METHOD FOR PRODUCING FILM FOR SEMICONDUCTOR DEVICE PRODUCTION, AND METHOD FOR SEMICONDUCTOR DEVICE PRODUCTION
摘要 The present invention relates to a film for semiconductor device production, which includes: a separator; and a plurality of adhesive layer-attached dicing tapes each including a dicing tape and an adhesive layer laminated on the dicing tape, which are laminated on the separator at a predetermined interval in such a manner that the adhesive layer attaches to the separator, in which the separator has a cut formed along the outer periphery of the dicing tape, and the depth of the cut is at most ⅔ of the thickness of the separator.
申请公布号 US2015162236(A1) 申请公布日期 2015.06.11
申请号 US201514624702 申请日期 2015.02.18
申请人 NITTO DENKO CORPORATION 发明人 TAKAMOTO Naohide;SHIGA Goji;ASAI Fumiteru
分类号 H01L21/683;C09J7/02;B32B38/10;B32B37/12;B32B38/00 主分类号 H01L21/683
代理机构 代理人
主权项 1. A film for semiconductor device production, which comprises: a separator; and a plurality of adhesive layer-attached dicing tapes each comprising a dicing tape and an adhesive layer laminated on the dicing tape, which are laminated on the separator at a predetermined interval in such a manner that the adhesive layer attaches to the separator, wherein the separator has a cut formed along the outer periphery of the dicing tape, wherein the depth of the cut is at most ⅔ of the thickness of the separator, and wherein the film for semiconductor device production is in a form of being wound as a roll.
地址 Osaka JP