发明名称 POLISHING SOLUTION COMPOSITION FOR GLASS HARD DISK SUBSTRATE
摘要 PROBLEM TO BE SOLVED: To provide a polishing solution composition for glass hard disk substrates, which can prevent a surface roughness of a glass substrate in a cleaning step from deteriorating while maintaining a polishing rate in a polishing step, in a method for manufacturing glass hard disk substrates comprising a step for polishing glass substrates with an acidic polishing solution and a step for cleaning them.SOLUTION: A polishing solution composition contains silica particles, a water-soluble metal salt of an amphoteric metal, and water, in which the water-soluble metal salt is selected from a group of aluminum (Al), zinc (Zn), gallium (Ga), tin (Sn), lead (Pb) and a combination thereof.
申请公布号 JP2015109128(A) 申请公布日期 2015.06.11
申请号 JP20130252323 申请日期 2013.12.05
申请人 KAO CORP 发明人 YOSHINO TAIKI
分类号 G11B5/84;B24B1/00;B24B7/24;B24B37/00;C03C19/00;C03C23/00;C09K3/14 主分类号 G11B5/84
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