| 发明名称 |
POLISHING AGENT AND POLISHING METHOD |
| 摘要 |
A polishing agent contains cerium oxide particles; water, and a monocarboxylic acid and/or a salt thereof, the monocarboxylic acid having a five-membered ring not including an unsaturated bond in the ring or a derivative thereof, a pH of the polishing agent is 3.5 or more to 7 or less. As the monocarboxylic acid, a tetrahydrofuran-2-carboxylic acid, a cyclopentane carboxylic acid, or the like can be used. |
| 申请公布号 |
US2015159049(A1) |
申请公布日期 |
2015.06.11 |
| 申请号 |
US201414557755 |
申请日期 |
2014.12.02 |
| 申请人 |
Asahi Glass Company, Limited |
发明人 |
Amano Yoshiharu |
| 分类号 |
C09G1/02;H01L21/306 |
主分类号 |
C09G1/02 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A polishing agent comprising:
cerium oxide particles; water; and a monocarboxylic acid having a five-membered ring not including an unsaturated bond in the ring or a derivative thereof, and/or a salt of the monocarboxylic acid, wherein a pH is 3.5 or more to 7 or less. |
| 地址 |
Chiyoda-ku JP |
