发明名称 |
PACKAGING STRUCTURE OF A MICROELECTRONIC DEVICE HAVING A HERMETICITY IMPROVED BY A DIFFUSION BARRIER LAYER |
摘要 |
Packaging structure (100) comprising: -at least one hermetically sealed cavity (102) in which at least one microelectronic device (104) is arranged, the cavity being formed between a substrate (106) and at least one cap layer (108) through which at least one release hole (110) is formed, -at least one portion of metallic material (120) arranged on the cap layer and hermetically plugging the release hole, -at least one diffusion barrier layer (114) comprising at least one non- metallic material, arranged on the cap layer and forming a diffusion barrier against an atmosphere outside the cavity at least around the release hole. |
申请公布号 |
WO2015082953(A1) |
申请公布日期 |
2015.06.11 |
申请号 |
WO2013IB02991 |
申请日期 |
2013.12.06 |
申请人 |
COMMISSARIAT À L'ÉNERGIE ATOMIQUE ET AUX ÉNERGIESALTERNATIVES;EPCOS AG |
发明人 |
SAINT-PATRICE, DAMIEN;DEN DEKKER, ARNOLD;GIESEN, MARCEL;HENN, GUDRUN;PORNIN, JEAN-LOUIS;REIG, BRUNO |
分类号 |
B81C1/00 |
主分类号 |
B81C1/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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