| 摘要 |
A substrate with an organic functional layer has a substrate, an organic functional layer arranged on the substrate, and a protective film arranged on the organic functional layer. The protective film has a plurality of silicon oxynitride layers represented by SiOxNy. Each of the silicon oxynitride layers has a refractive index difference of 0.1 or less in absolute value, and x and y satisfy 0.5 ≤ x ≤ 1.0 and -2.2y + 2.1 ≤ x ≤ -2.2y + 2.41. In the protective film, the value of x in the silicon oxynitride layer on the side farther from the organic functional layer, from amongst the plurality of silicon oxynitride layers, is greater than that of the silicon oxynitride layer formed at the position nearest to the organic functional layer by at least 0.05. |
