| 摘要 |
PROBLEM TO BE SOLVED: To provide a piezoelectric vibration element having high reliability which suppresses reduction in an electrode dimension during frequency adjustment and has excellent weather resistance and heat resistance, and also to provide a piezoelectric device using the piezoelectric vibration element, a method of manufacturing the piezoelectric vibration element, and a method of manufacturing the piezoelectric device using the piezoelectric vibration element.SOLUTION: In a crystal vibration element 2, excitation electrodes 23a, 23b are formed on the surface and rear surface of a crystal vibration plate. The excitation electrode contains copper as a main component and comprises a ternary-system alloy containing a first additive whose first sputtering rate is lower than copper as the additive and which is a metal element unlikely to be corroded with respect to etchant, and a second additive which is an element to form a solid solution with copper. The outer peripheral part of the excitation electrode is a region (9) whose first additive is rich. |
