| 摘要 |
PROBLEM TO BE SOLVED: To provide an electrospray device which enables a substrate and an earth plate to be easily separated from each other. ! SOLUTION: An electrospray device 100 deposits a solution material sprayed from a nozzle 1 on a substrate 200 as a thin film and includes an earth plate 2 which contacts with the substrate 200 to ground the substrate 200 during formation of the thin film. Multiple protruding parts 2b are provided on a surface 2a of the earth plate 2 with which the substrate 200 contacts. ! COPYRIGHT: (C)2015,JPO&INPIT |
