comb drive including a pivotable mirror element

摘要

A comb drive includes a pivotable mirror element, a first and a second comb electrode, the second comb electrode being movable along an offset direction relative to the first electrode from a minimum into a maximum offset position, the second electrode being connected to the mirror element via a lever arm pivotable about a pivot axis, the first and second comb electrodes being interlockingly engaged so that a first comb tooth of the first electrode and a second comb tooth of the second electrode are situated adjacent to one another along a projection direction extending perpendicularly to the offset direction, the first comb tooth and/or the second comb tooth being configured so that an average distance between the first comb tooth and the second comb tooth along the projection direction extending perpendicularly to the offset direction decreases when moving the second electrode from the minimum into the maximum offset position.

主权项

1. A comb drive, comprising:
a pivotable mirror element; a first comb electrode; a second comb electrode, the second comb electrode being movable along an offset direction relative to the first comb electrode from a minimum offset position into a maximum offset position, the second comb electrode being connected to the mirror element via a lever arm pivotable about a pivot axis, the first comb electrode and the second comb electrode being interlockingly engaged so that a first comb tooth of the first comb electrode and a second comb tooth of the second comb electrode are situated adjacent to one another along a projection direction extending perpendicularly to the offset direction; wherein the first comb tooth and/or the second comb tooth are configured so that an average distance between the first comb tooth and the second comb tooth along the projection direction extending perpendicularly to the offset direction is reduced when moving the second comb electrode from the minimum offset position into the maximum offset position.