| 摘要 |
In the present invention, the transport of a sample among an FIB device, an electron microscope and an atom probe device is carried out safely and readily, allowing for an atom probe analysis of a material readily altered by atmospheric exposure. The sample holder for holding a sample (12) is provided with an atmosphere-blocking mechanism for preventing the alteration of a sample by atmospheric exposure during sample transport between devices, and, as part of the atmosphere-blocking mechanism at the front end of the sample holder, a housing (21) having a structure allowing for attachment and detachment inside an analytical vacuum device such as an atom probe device. |
