PRESSURE-TYPE FLOW RATE CONTROL DEVICE

摘要

The present invention provides a pressure-type flow rate control device that makes it possible to reduce the termination response time during flow rate switching and improve terminal response characteristics. This pressure-type flow rate control device is provided with: a main body (5) provided with a fluid channel (4) communicating between a fluid inlet (2) and a fluid outlet (3); a pressure control valve (CV) fixed to the main body (5), the pressure control valve (CV) opening and closing the fluid channel (4); an orifice (OL) interposed in the fluid channel (4) on the downstream side of the pressure control valve (CV); and a pressure sensor (P1) fixed to the main body (5), the pressure sensor (P1) detecting the internal pressure in the fluid channel (4) between the pressure control valve (CV) and the orifice (OL). The fluid channel (4) is provided with a first channel part (4a) for connects the pressure control valve (CV) and a pressure detection chamber (4b) above a pressure detection surface (P1a) of the pressure sensor (P1), and a second channel part (4c) for connecting the pressure detection chamber (4b) and the orifice (OL), the second channel part (4c) being set away from the first channel part (4a).