CROSS SECTION PROCESSING METHOD, AND CROSS SECTION PROCESSING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a cross section processing method and a cross section processing device by which a flat cross section can be formed on a sample including a plurality of kinds of substances different in hardness by a focused ion beam.SOLUTION: A cross section processing method comprises: the step of performing an etching treatment on a region to be processed while variably controlling an irradiation interval of a focused ion beam, its irradiation time, etc. on the basis of a piece of information of a cross section of SEM image obtained by observation of the cross section. With this method, a flat observation section can be formed at a uniform etching rate even if a sample includes a plurality of kinds of substances different in hardness.