LIGHTING APPARATUS, AND OPTICAL INSPECTION APPARATUS AND OPTICAL MICROSCOPE USING THE LIGHTING APPARATUS

摘要

Provided are a lighting apparatus, and an optical inspection apparatus and an optical microscope using the lighting apparatus. The lighting apparatus includes a light source that emits light, an optical device that outputs light that is more uniformly intense over a predetermined ray angle distribution than light input thereto; a multi-reflection device that reflects light multiple times, the multi-reflection device having a light incident surface receiving light and a light emission surface that emits multiply reflected light, and a light diffusion device that diffuses the light emitted from the light emission surface of the multi-reflection device. The light source, the optical device, the multi-reflection device, and light diffusion device share an optical path.

主权项

1. A lighting apparatus, comprising:
a light source that emits light; an optical device that outputs light that is more uniformly intense over a predetermined ray angle distribution than light input thereto, the optical device being in a light path of the light source; a multi-reflection device that reflects light multiple times, the multi-reflection device having a light incident surface that receives light and a light emission surface that emits multiply-reflected light, the multi-reflection device being in a light path of the light source; and a light diffusion device that diffuses light emitted from the light emission surface of the multi-reflection device.