| 摘要 |
If the modulus of elasticity for an adhesive (143) for a spacer (14A) is high, e.g., 1.0 × 109 Pa, an increase in distortion relative to an increase in press-fit amount is exhibited when the press-fit amount becomes greater than 200 µm. If, however, the modulus of elasticity for the adhesive (143) for the spacer (14A) is low, e.g., 1.0 × 107 Pa, the distortion does not increase if the press-fit amount is 0-1,000 µm, and output is not inverted. Accordingly, when the modulus of elasticity for the adhesive (143) for the spacer (14A) is low (e.g., no more than 1.0 × 107 Pa), an SUS plate (15) and a sensor unit (16) do not generate a mode of extension in the longitudinal direction and sensor outputs do not invert. DRAWING: FIG. 6: AA Distortion (ppm) BB Press-fit amount (µm) |
