发明名称 AN APPARATUS FOR MACHING A SINGLE CRYSTAL
摘要 <p>According to an embodiment, an apparatus for machining a single crystal comprises: a work plate; a work table which moves, on the work plate, in a first direction or in a second direction perpendicular to the first direction; a first single crystal support unit which fixes the first single crystal and moves, on the work table, in the first direction; and a machining unit which moves, on the work plate, in a third direction perpendicular both to the first direction and to the second direction and performs machining of the first single crystal fixed on the first single crystal support unit, wherein the work table rotates the first single crystal support unit.</p>
申请公布号 KR20150064358(A) 申请公布日期 2015.06.11
申请号 KR20130148976 申请日期 2013.12.03
申请人 LG SILTRON INCORPORATED 发明人 LEE, JUN HO
分类号 C30B33/00;C30B31/14 主分类号 C30B33/00
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