| 摘要 |
PROBLEM TO BE SOLVED: To provide methods of manufacturing a cold seal fluid-filled display apparatus including MEMS.SOLUTION: A fluid substantially surrounds moving components of an MEMS display to reduce effects of stiction and to improve optical and electromechanical performance of the display. The invention relates to a method for sealing the MEMS display at a lower temperature such that vapor bubbles forms only at temperature approximately 15 to 20°C below sealing temperature. In some embodiments, the MEMS display apparatus includes a first substrate, a second substrate separated from the first substrate by a gap and supporting an array of light modulators, a fluid substantially filling the gap, a plurality of spacers within the gap, and a sealing material joining the first substrate to the second substrate. |
