PROCESS FOR OBTAINING A PLURALITY OF LAMINAS MADE OF A MATERIAL HAVING MONOCRYSTALLINE STRUCTURE FROM AN INGOT

摘要

A method is described for obtaining a plurality of laminas made of a material having monocrystalline structure, by detachment from an ingot made of the material having monocrystalline structure, the ingot having an axis of symmetry (X), the method comprising: creating, in the ingot by use of a pulsed laser beam, a plurality of sacrificial layers with modified crystalline structure, the plurality of sacrificial layers being distributed along the axis of symmetry (X), the plurality of sacrificial layers dividing the ingot in a plurality of residual layers; subjecting the plurality of sacrificial layers to chemical etching, thereby causing a separation of the residual layers; and detaching the residual layers to produce the plurality of laminas made of a material having monocrystalline structure.

主权项

1. A method for obtaining a plurality of laminas made of a material having monocrystalline structure, by detachment from an ingot made of the material having monocrystalline structure, the ingot having an axis of symmetry (X), the method comprising:
creating, in the ingot by use of a pulsed laser beam, a plurality of sacrificial layers with modified crystalline structure, the plurality of sacrificial layers being distributed along the axis of symmetry (X), the plurality of sacrificial layers dividing the ingot in a plurality of residual layers; subjecting the plurality of sacrificial layers to chemical etching, thereby causing a separation of the residual layers; and detaching the residual layers to produce the plurality of laminas made of a material having monocrystalline structure.