SUBSTRATE INSPECTION APPARATUS INCLUDING LIQUID CRYSTAL MODULATOR

摘要

PROBLEM TO BE SOLVED: To provide a liquid crystal modulator having a structure optimized for inspecting defects in a substrate, and a substrate inspection apparatus including the liquid crystal modulator. ! SOLUTION: A substrate inspection apparatus includes a liquid crystal modulator MD provided on the substrate, a light source unit provided at a distance from the liquid crystal modulator MD, a beam splitter BS provided between the liquid crystal modulator and the light source LS and configured to reflect light from the light source LS to the light source modulator MD, and a measurement unit MU disposed to face the liquid crystal modulator MD across the beam splitter BS and configured to sense the light from the liquid crystal modulator MD. ! COPYRIGHT: (C)2015,JPO&INPIT