| 发明名称 |
ENCODER, MANUFACTURING METHOD OF ENCORE SCALE MANUFACTURING METHOD OF ENCODER, AND DRIVING APPARATUS |
| 摘要 |
An encoder includes a scale unit having a substrate configured of a metal material and in which a pattern is formed on a first surface of the substrate and a passive state member is formed on a second surface different from the first surface in the substrate, and a detection unit that is configured to move relative to the scale unit and detects the pattern. |
| 申请公布号 |
US2015160041(A1) |
申请公布日期 |
2015.06.11 |
| 申请号 |
US201214368355 |
申请日期 |
2012.12.27 |
| 申请人 |
NIKON CORPORATION |
发明人 |
Hikichi Shintaro;Sugiyama Hideaki |
| 分类号 |
G01D5/12 |
主分类号 |
G01D5/12 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. An encoder comprising:
a scale unit having a substrate configured of a metal material and in which a pattern is formed on a first surface of the substrate and a passive state member is formed on a second surface different from the first surface in the substrate; and a detection unit that is configured to move relative to the scale unit and detects the pattern. |
| 地址 |
Chiyoda-ku, Tokyo JP |
