| 摘要 |
PROBLEM TO BE SOLVED: To provide a process liquid supply device which achieves high replaceability of a process liquid and stably supplies the process liquid.SOLUTION: In a supply pump 6 provided at a processing liquid supply device 5, which discharges a process liquid to a workpiece W through a discharge part 51, a tube 62 forming one part of a supply passage of the process liquid has elasticity and a guide part 61 is provided along a direction that the tube 62 extends so as to restrict an outer surface of the tube 62. A pressing part 65 moves with the tube 62 being interposed and pressed between the guide part 61 and the pressing part 65, and thereby supplies the process liquid to the discharge part 51. The tube 62 is pressed only by the pressing part 65 while the supply pump 6 supplies the process liquid to the discharge part 51. |
