METHOD OF DEPOSITION OF HIGHLY SCRATCH-RESISTANT DIAMOND FILMS ONTO GLASS SUBSTRATES BY USE OF A PLASMA-ENHANCED CHEMICAL VAPOR DEPOSITION

摘要

A system and process for inter alia coating or creating a substrate with a layer of carbon or diamond film using a microwave field and a hydrocarbon gas environment. The carbon or diamond film creates a stronger and more scratch resistant substrate that is less prone to breaking or cracking. Additionally, the coating may provide superior heat transfer properties enabling the final device to be used in passive cooling applications such as for mobile phone displays.

主权项

1. A system for forming a film on a substrate, the system comprising:
a source of gas that provides at least a carbon-based gas; a holding device to hold a target substrate; an environment configured to contain the gas about the target substrate; and a microwave source configured to project a microwave field towards the target substrate to create a carbon film upon the target substrate for creating a stronger and more scratch resistant substrate with enhanced thermal transport properties.