Process for Producing Trichlorosilane

摘要

The invention relates to an improved process to manufacture TCS in a polysilicon plant based upon combining a high temperature FBR process reacting metallurgical grade silicon, hydrogen, and silicon tetrachloride (STC) to make trichlorosilane (TCS) and a high temperature thermal converter to hydrogenate STC to TCS and hydrogen chloride.

主权项

1. A process for making hydrohalosilanes, the process comprising the steps of:
a. reacting feeds of silicontetrahalide and hydrogen in a homogenous gas phase reactor and exhausting a gaseous stream having at least one hydrohalosilane and a hydrogen halide and unreacted feeds; and b. condensing a part of the gaseous stream and feeding at least a portion of the remaining gaseous stream into a fluidized bed reactor in which silicon reacts with hydrogen halide to produce the at least one hydrohalosilane;wherein the hydrogen halide is not separated from the hydrogen in the gaseous by-product before feeding it into the fluidized bed reactor.