发明名称 SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME
摘要 <p>A semiconductor device according to the present invention comprises a first laminate having first conductive patterns and first interlayer insulation films alternately laminated; a second laminate formed on an upper part of the first laminate, and having second conductive patterns and second interlayer insulation films alternately laminated; an interface pattern formed between the first laminate and the second laminate; first penetration areas penetrating the first laminate and the interface pattern, and including a first protrusion part protruding toward side wall of the interface pattern; second penetration areas penetrating the second laminate, and connected to the first penetration areas; and penetration structures formed along the side wall of the first and second penetration areas.</p>
申请公布号 KR20150064520(A) 申请公布日期 2015.06.11
申请号 KR20130149335 申请日期 2013.12.03
申请人 SK HYNIX INC. 发明人 YOON, MYUNG SUNG
分类号 H01L27/115 主分类号 H01L27/115
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