发明名称 SYSTEM AND METHOD FOR ANALYZING A GAS
摘要 The invention relates to a gas analysis system comprising: • - a fluidic channel intended for the flow of a gas to be analyzed, • - at least one detector laid out in said fluidic channel and adapted for measuring interactions of the gas with said detector, said detector comprising at least one resonator (100) of the electromechanical microsystem (MEMS) and/or electromechanical nanosystem (NEMS) type, • - an actuation device (101) for vibrationally actuating the resonator according to an excitation signal applied to an input of the detector, and • - a detection device (102) adapted for providing an output electric signal representative of the vibrations of said resonator, • - a read-out device connected to an input of the detector and configured for simultaneously measuring, from the output signal of said at least one detector, the change in resonance frequency and the change in amplitude of the vibrations at the resonance frequency of the resonator, and • - a processing device configured for determining from said changes at least one fluidic characteristic of said gas.
申请公布号 WO2015082956(A1) 申请公布日期 2015.06.11
申请号 WO2013IB03247 申请日期 2013.12.02
申请人 COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIESALTERNATIVES;APIX ANALYTICS;CALIFORNIA INSTITUTE OF TECHNOLOGY 发明人 ANDREUCCI, PHILIPPE;COLINET, ERIC;DURAFFOURG, LAURENT;MYERS, EDWARD;PETITJEAN, MÉLANIE;ROUKES, MICKAEL LEE;WHITING, JOSHUA
分类号 G01N9/00;G01N11/00;G01N30/60;G01N30/78 主分类号 G01N9/00
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