METHOD, STORAGE MEDIUM AND SYSTEM FOR CONTROLLING THE PROCESSING OF LOTS OF WORKPIECES

摘要

A method includes processing each of a plurality of lots with at least one first equipment and moving some of the plurality of lots to a first storage. For each of a plurality of second equipments, an expected dispatch time of one or more next lots for processing by the second equipment is determined Each of the lots in the first storage is assigned to one of the plurality of second equipments on the basis of at least the determined expected dispatch times and moved to one of a plurality of second storages that is associated with one of the plurality of second equipments to which the respective lot was assigned. For each of the plurality of second equipments, each of the lots in the second storage associated with the second equipment is moved to the second equipment and are processed with the second equipment.

主权项

1. A method, comprising:
processing each of a plurality of lots with a respective one of at least one first equipment; moving at least some of said plurality of lots from said respective one of said at least one first equipment to a first storage; for each of a plurality of second equipments, determining an expected dispatch time of one or more next lots for processing by said second equipments; assigning each of the lots in said first storage to one of said plurality of second equipments on the basis of at least the determined expected dispatch time; moving each of the lots in said first storage to one of a plurality of second storages that is associated with the one of said plurality of second equipments to which the respective lot was assigned; and for each of said plurality of second equipments, moving each of the lots in said second storage associated with the second equipment to the second equipment and processing the lots from said second storage associated with the second equipment with the second equipment.