发明名称 |
METHOD FOR PRODUCING MICROCARRIERS |
摘要 |
The present invention relates to a method for producing microcarriers comprising the following steps: (a) providing a wafer having a sandwich structure comprising a bottom layer, a top layer and an insulating layer located between said bottom and top layers, (b) etching away the top layer to delineate lateral walls of bodies of the microcarriers, (c) depositing a first active layer at least on a top surface of the bodies, (d) applying a continuous polymer layer over the first active layer, (e) etching away the bottom layer and the insulating layer, (f) removing the polymer layer to release the microcarriers. |
申请公布号 |
US2015162141(A1) |
申请公布日期 |
2015.06.11 |
申请号 |
US201314414174 |
申请日期 |
2013.07.22 |
申请人 |
MYCARTIS NV |
发明人 |
Tornay Raphael;Demierre Nicolas;Gamper Stephan;Renaud Philippe |
分类号 |
H01G13/06 |
主分类号 |
H01G13/06 |
代理机构 |
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代理人 |
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主权项 |
1. A method for producing microcarriers comprising the following steps:
(a) providing a wafer having a sandwich structure comprising a bottom layer, a top layer and an insulating layer located between said bottom and top layers, (b) etching away the top layer to delineate lateral walls of bodies of the microcarriers, (c) depositing a first active layer at least on a top surface of the bodies, (d) applying a continuous polymer layer over the first active layer, (e) etching away the bottom layer and the insulating layer, and (f) removing the polymer layer to release the microcarriers. |
地址 |
Zwijnaarde / Ghent BE |