| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To collect particles more efficiently with a filter combined in a fine flow path. <P>SOLUTION: A particle collector comprises: a flow path substrate 101 having a flow path formation area 121 on an inside surface; a junction area 102 formed on the inside surface, surrounding the flow path formation area 121 of the flow path substrate 101; a filter layer (separation layer) 103 which is joined to the flow path substrate 101 in the junction area 102 and covers the flow path formation area 121; and a flow path mold comprising a protrusion region 104 and a recess region 105 formed in the flow path formation area 121 of the flow path substrate 101. The flow path substrate 101 is formed in a state where the protrusion region 104 is separated from the filter layer 103, and the flow path substrate 101 is deformable into a state where the protrusion region 104 and the filter layer 103 come into contact with each other. <P>COPYRIGHT: (C)2012,JPO&INPIT</p> |
