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发明名称
CLEANING TOOL AND METHOD FOR A POLYSILICON REACTOR
摘要
<p>Systems and methods are provided for cleaning an interior surface of a chemical vapor deposition reactor bell used in the production of polysilicon.</p>
申请公布号
EP2726223(B1)
申请公布日期
2015.06.10
申请号
EP20120732828
申请日期
2012.06.29
申请人
MEMC ELECTRONIC MATERIALS S.P.A.
发明人
BOVIO, EZIO;MOLINO, PAOLO;GAVA, DIEGO
分类号
C23C16/44;B08B9/08
主分类号
C23C16/44
代理机构
代理人
主权项
地址
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