摘要 |
<p><P>PROBLEM TO BE SOLVED: To excellently control the temperature of an object to a target temperature even if the time constant of the object and the idle time of heating medium piping are large when the temperature of the object is controlled using heating medium fluid. <P>SOLUTION: When object temperature (Ts) settles at a target temperature (SV) (step S14, Yes), the temperature difference (D) between the object temperature and heating medium temperature (T1) is measured, and the sum value of the current temperature difference (D) and target temperature (SV) is fixed as a target temperature (SSV) for heating medium temperature (S20-S21). The heating medium temperature is continuously controlled thereafter (S21) using a fixed target temperature (SSVfix) until an event requiring change in target temperature (SSVfix) (for example, continuous disturbance) occurs (S27, Yes). <P>COPYRIGHT: (C)2012,JPO&INPIT</p> |