| 摘要 |
The purpose of the present invention is to inhibit degradation of conductance of an exhaust flow path, and increase exhaust speed of a cold trap. The cold trap (10) is arranged between a vacuum container (12) and a turbo molecule pump (14). The cold trap (10) has a cold panel (24), and a cold panel container (26) surrounding the cold panel (24) in the exhaust flow path (18). The cold panel (4) has an expansion panel (34) outside the cold panel container (26). The expansion panel (34) is arranged in the vacuum container (12). |
