发明名称 デジタル光学技術を用いた厚さ測定装置及び方法
摘要 <p>The present invention relates to an apparatus and a method for measuring thickness using a digital optical technology. The apparatus and the method for measuring thickness using a digital optical technology comprise: a light source which emits light; a light divider which reflects the light emitted from the light source or passes light reflected by an object being measured; a lens unit which focuses the light reflected by the light divider on the object being measured; a reflective optical path converting unit which selectively reflects the light penetrating the light divider; and a spectroscope which analyzes the light reflected by the reflective optical path converting unit in order to acquire information on the thickness of the object being measured. Therefore, provided in the present invention are the apparatus and the method for measuring thickness using a digital optical technology, which can minimize the loss of light by using the reflection of the light and can also measure the thickness of multiple areas being measured at the same time. [Reference numerals] (110) Light source; (151) First light divider; (152) Second light divider; (160) Display unit</p>
申请公布号 JP5733846(B2) 申请公布日期 2015.06.10
申请号 JP20130153982 申请日期 2013.07.24
申请人 发明人
分类号 G01B11/06;G01N21/17 主分类号 G01B11/06
代理机构 代理人
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