| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a manufacturing method of an article having a fine pattern which is directly formed on a hard base material and has excellent processing accuracy on a surface. <P>SOLUTION: A manufacturing method of an article having a fine pattern on a surface comprises: (a) a step of applying a composition 20 for coating to a surface of a hard base material 10; (b) a step of making the composition 20 for coating highly viscous so that viscosity becomes 10000 mPa s or higher and forming a photocurable thin film 22 whose thickness is less than or equal to a depth of a reversal pattern 32 of a hard mold 30; (c) a step of sandwiching the photocurable thin film 22 between the hard mold 30 and the hard base material 10 and forming a cured material 24 by curing the photocurable thin film 22 by irradiating it with light; (d) a step of separating the hard mold 30 from the cured material 24 to obtain an article having a fine pattern 26 composed of the cured material 24 on the surface; and (e) a step of directly forming a fine pattern 12 on the surface of the hard base material 10 by etching the fine pattern 26 as a resist pattern. <P>COPYRIGHT: (C)2013,JPO&INPIT</p> |
