摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an ion sensing apparatus which is capable of improving accuracy in measurement of ion concentration, and an ion generator including the ion sensing apparatus. <P>SOLUTION: A common feedback circuit 132 is provided which makes common mode voltages of an output voltage VOM and an output voltage VOP into a voltage level Vc meeting the mathematical expression (1): VL<Vc<VH (in which VL represents a minimum voltage level that a first sensor can output, VH represents a maximum voltage level that the first sensor can output and Vc represents the fixed voltage level). <P>COPYRIGHT: (C)2013,JPO&INPIT</p> |