发明名称 |
Laser crystallization apparatus and organic light-emitting diode (oled) display manufactured using the same |
摘要 |
A laser crystallization apparatus and an organic light-emitting diode (OLED) display manufactured using the same are disclosed. In one aspect, the apparatus includes a stage configured to receive a target substrate having an amorphous silicon layer formed thereon and a first laser unit configured to crystalize the amorphous silicon layer so as to form a polycrystalline silicon layer. The polycrystalline silicon layer includes a plurality of protrusions. The apparatus also includes a second laser unit configured to remove at least part of the protrusions. |
申请公布号 |
EP2881213(A1) |
申请公布日期 |
2015.06.10 |
申请号 |
EP20140174570 |
申请日期 |
2014.06.26 |
申请人 |
SAMSUNG DISPLAY CO., LTD. |
发明人 |
CHO, JOO WOAN;CHEONG, BYOUNG HO;CHOO, BYOUNG KWON |
分类号 |
B23K26/00;B23K26/36;H01L27/12;H01L27/32 |
主分类号 |
B23K26/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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