发明名称 Laser crystallization apparatus and organic light-emitting diode (oled) display manufactured using the same
摘要 A laser crystallization apparatus and an organic light-emitting diode (OLED) display manufactured using the same are disclosed. In one aspect, the apparatus includes a stage configured to receive a target substrate having an amorphous silicon layer formed thereon and a first laser unit configured to crystalize the amorphous silicon layer so as to form a polycrystalline silicon layer. The polycrystalline silicon layer includes a plurality of protrusions. The apparatus also includes a second laser unit configured to remove at least part of the protrusions.
申请公布号 EP2881213(A1) 申请公布日期 2015.06.10
申请号 EP20140174570 申请日期 2014.06.26
申请人 SAMSUNG DISPLAY CO., LTD. 发明人 CHO, JOO WOAN;CHEONG, BYOUNG HO;CHOO, BYOUNG KWON
分类号 B23K26/00;B23K26/36;H01L27/12;H01L27/32 主分类号 B23K26/00
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