PIEZORESISTIVE ACCELEROMETER, AND MANUFACTURING METHOD THEREOF

摘要

Disclosed are a piezoresistive accelerometer and a manufacturing method thereof. According to the present invention, the piezoresistive accelerometer can prevent the superabundant displacement of a mass. The piezoresistive accelerometer according to an embodiment comprises; an external supporter; a mass arranged in the inner wall of the external supporter; a connection unit of connecting the mass to the external supporter; a plurality of piezoresistive bodies connected between the mass to the external supporter; and a bar for the superabundant displacement prevention, wherein one end is connected to the mass. The bar for the superabundant displacement prevention is arranged in a horizontal direction of the external supporter.