发明名称 電子部品パッケージ
摘要 <p><P>PROBLEM TO BE SOLVED: To provide an electronic component package which maintains airtightness in a package. <P>SOLUTION: A piezoelectric vibrator 1 of this invention is an electronic component package which encloses an electronic component 4 in a cavity 30 formed between multiple substrates which are joined to each other. In the piezoelectric vibrator 1, an inter-substrate wiring electrode 5 is hermetically formed in the base substrate 2 for creating electrical continuity between a bottom surface (external electrode 6) of the base substrate 2 and an upper surface (internal electrode 9) of the base substrate 2. <P>COPYRIGHT: (C)2013,JPO&INPIT</p>
申请公布号 JP5731870(B2) 申请公布日期 2015.06.10
申请号 JP20110072734 申请日期 2011.03.29
申请人 发明人
分类号 H03H9/02;H01L23/04;H01L23/08 主分类号 H03H9/02
代理机构 代理人
主权项
地址