发明名称 |
A method of forming a micro-electro-mechanical system (MEMS) structure |
摘要 |
Micro-Electro-Mechanical System (MEMS) structures, methods of manufacture and design structures are provided. The method of forming a MEMS structure includes forming a wiring layer on a substrate comprising actuator electrodes and a contact electrode. The method further includes forming a MEMS beam above the wiring layer. The method further includes forming at least one spring attached to at least one end of the MEMS beam. The method further includes forming an array of mini-bumps between the wiring layer and the MEMS beam. |
申请公布号 |
GB2505825(B) |
申请公布日期 |
2015.06.10 |
申请号 |
GB20130022198 |
申请日期 |
2012.06.01 |
申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
CHRISTOPHER V JAHNES;ANTHONY K STAMPER |
分类号 |
B81B3/00 |
主分类号 |
B81B3/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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