发明名称 METHOD OF OBTAINING METAL OXIDE-CONTAINING LAYERS
摘要 FIELD: chemistry.SUBSTANCE: invention relates to obtaining metal oxide-containing layers of a non-water solution. The method of liquid-phase obtaining the metal-oxide-containing layers from the non-water solution includes the application on a substrate of a water-free composition, containing i) at least one metal oxoalcoxide of the general formula MO(OR)[O(R'O)H]X[R"OH], in which x stands for a number from 3 to 25, y stands for a number from 1 to 10, z stands for a number from 3 to 50, a stands for a number from 0 to 25, b stands for a number from 0 to 20, c stands for a number from 0 to 1, d stands for a number from 0 to 25, M stands for indium, gallium, tin and/or zinc, R, R' and R" respectively stand for an organic residue, X stands for fluorine, chlorine, bromine, iodine, and ii) at least one solvent. In case of necessity the applied composition is dried and converted into a metal oxide-containing layer.EFFECT: invention makes it possible to obtain metal oxide layers with the targeted, uniform and reproducible stoichiometry, high homogeneity and optimal electric working characteristics.13 cl, 1 dwg, 1 tbl, 1 ex
申请公布号 RU2553151(C2) 申请公布日期 2015.06.10
申请号 RU20120110476 申请日期 2010.08.13
申请人 EHVONIK DEGUSSA GMBKH 发明人 SHTAJGER,JURGEN;PKHAM,DUI VU;TIM,KHAJKO;MERKULOV,ALEKSEJ ANDREEVICH;KHOPPE,ARNE
分类号 C23C18/12 主分类号 C23C18/12
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