发明名称 |
Surface position detection apparatus, exposure apparatus, and exposure method |
摘要 |
<p>A surface position detection apparatus capable of highly precisely detecting the surface position of a surface to be detected without substantially being affected by relative positional displacement due to a polarization component occurring in a light flux having passed through a reflective surface. In the apparatus, a projection system has a projection side prism member (7) having first reflective surfaces (7b, 7c), and a light receiving system has a light receiving prism member (8) having second reflective surfaces (8b, 8c) arranged in correspondence with the projection side prism member. The surface position detection apparatus further has a member for compensating relative positional displacement due to a polarization component of a light flux having passed through the first and second reflective surfaces.</p> |
申请公布号 |
EP2463715(B1) |
申请公布日期 |
2015.06.10 |
申请号 |
EP20120150442 |
申请日期 |
2006.06.28 |
申请人 |
NIKON CORPORATION |
发明人 |
HIDAKA, YASUHIRO;NAGAYAMA, TADASHI |
分类号 |
G03F9/00;G01B11/00;G03F7/20 |
主分类号 |
G03F9/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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