摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a resonator element improving an impact resistance by increasing the strength of a base. <P>SOLUTION: A quartz crystal resonator element 1 is a resonator element formed by etching the outer shape of a Z plate, as a substrate, which is cut from the crystal in the rough at predetermined angles with respect to X, Y and Z axes orthogonal to each other as the crystal axes of the crystal. The quartz crystal resonator element 1 is equipped with: a base 10; a pair of resonating arms 11 extending from the base 10 in the Y-axis direction; and notches 12, 13 formed by notching the base 10 in the X-axis direction. The notch 12 has a tilting portion 12c formed between a side 12a along the notching direction and an outer circumference 10b of the base 10 by notching the base 10 from the negative side of the X axis towards the positive side so that the width of the notch 12 increases as it approaches the outer circumference 10b. <P>COPYRIGHT: (C)2011,JPO&INPIT</p> |