| 摘要 |
An inline type cold trap having relatively great exhaust ability can be properly installed on a narrow space. The cold trap (10) is arranged between a vacuum container (12) and a vacuum pump for the vacuum container (12). A cold panel (24) is arranged on an exhaust flow path (18) from an exhaust port (30) of the vacuum container (12) to an intake port (31) of the vacuum pump. A cold panel container (26) has an inlet to connect the exhaust flow path (18) to the exhaust port of the vacuum container (12), and an outlet to connect the exhaust flow path (18) to the intake port (31) of the vacuum pump. The outlet is eccentrically formed to the inlet. |
