发明名称 ナノ構造スタンプ、型押しロール、ナノ構造部を連続型押しする装置および方法
摘要 A nanostructure die with a concavely curved nanostructured die surface for seamless embossing of at least one peripheral ring of a jacket surface of an embossing roll in a step-and-repeat process and an embossing roll for continuous embossing of nanostructures with an embossing layer, which has been applied on a body of revolution, with a jacket surface with at least one peripheral ring which is made seamless at least in the peripheral direction and which is embossed in the step-and-repeat process. Furthermore, the invention relates to a method and a device for producing such an embossing roll for continuous embossing of nanostructures as well as a method for producing such a nanostructure die and a method for producing an embossing substrate.
申请公布号 JP5730449(B2) 申请公布日期 2015.06.10
申请号 JP20140539249 申请日期 2011.12.06
申请人 エーファウ・グループ・エー・タルナー・ゲーエムベーハー 发明人 ゲラルト クラインドル;マークス ヴィンプリンガー;トーマス グリンスナー
分类号 H01L21/027;B29C33/38;B29C59/04 主分类号 H01L21/027
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