发明名称 |
ナノ構造スタンプ、型押しロール、ナノ構造部を連続型押しする装置および方法 |
摘要 |
A nanostructure die with a concavely curved nanostructured die surface for seamless embossing of at least one peripheral ring of a jacket surface of an embossing roll in a step-and-repeat process and an embossing roll for continuous embossing of nanostructures with an embossing layer, which has been applied on a body of revolution, with a jacket surface with at least one peripheral ring which is made seamless at least in the peripheral direction and which is embossed in the step-and-repeat process. Furthermore, the invention relates to a method and a device for producing such an embossing roll for continuous embossing of nanostructures as well as a method for producing such a nanostructure die and a method for producing an embossing substrate. |
申请公布号 |
JP5730449(B2) |
申请公布日期 |
2015.06.10 |
申请号 |
JP20140539249 |
申请日期 |
2011.12.06 |
申请人 |
エーファウ・グループ・エー・タルナー・ゲーエムベーハー |
发明人 |
ゲラルト クラインドル;マークス ヴィンプリンガー;トーマス グリンスナー |
分类号 |
H01L21/027;B29C33/38;B29C59/04 |
主分类号 |
H01L21/027 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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