| 摘要 |
<p>A two-fluid nozzle 34 for spraying, toward a processing target object, droplets of a processing solution which are formed by mixing the processing solution discharged from a liquid discharge portion 48 and a gas discharged from a gas discharge opening 52 can uniformly spray the droplets of the processing solution having small diameters. Here, the liquid discharge portion 48 includes a multiple number of liquid discharge openings 47 arranged along a circle inside the gas discharge opening 52, and the multiple number of liquid discharge openings 47 discharge the processing solution in an outward direction of the circle.</p> |
