| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a low-cost vacuum processing apparatus which can effectively suppress the attachment and accumulation of generation gas by effectively heating a view window surface in contact with vacuum atmosphere without damaging the function of understanding the condition in a processing performed inside. <P>SOLUTION: In this invention, a view window 8 installed on the wall surface of a vacuum chamber comprises a light-transmissive plate material 81 in which conducting wire W is buried. When the direction from the center Cp of the light-transmissive plate material to the surroundings is defined as the radial direction and in a virtual circle area having the line connecting the center of the light-transmissive plate material and a middle point Mp of the distance to the surroundings of the light-transmissive plate material which is shortest from the center in the radial direction, as the radius, excluding the central area of the light-transmissive plate material, the conducting wire is arranged to meander, and the free edge is extended to the external surface of the light-transmissive plate material. <P>COPYRIGHT: (C)2013,JPO&INPIT</p> |
