| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a substrate with a transparent electrode exhibiting excellent conductivity, transparency and durability even if the film thickness is made thin, by using a transparent conductive oxide layer containing zinc oxide as a main component and added with a predetermined amount of aluminum oxide and silicon oxide. <P>SOLUTION: In a substrate with a transparent electrode having a transparent conductive oxide layer containing zinc oxide as a main component formed on a substrate, the transparent conductive oxide layer contains 1.2 wt.% or more and 2.1 wt.% or less of silicon oxide, and 0.2 wt.% or more and less than 1.0 wt.% of aluminum oxide. Resistivity of the transparent conductive oxide layer is 4.5×10<SP POS="POST">-3</SP>Ωcm or less, the change▵R of resistivity when being left as it is under an environment of 85°C and 85%RH for 1000 hours satisfies a relationΔR=a×exp(-b×d/T)+1.0 [1.2≤a≤3.0, 15≤b≤45, a, b are real numbers](formula 1), when the temperature (T)is T=300K, and the film thickness (d) is 20 nm≤d≤120 nm. <P>COPYRIGHT: (C)2013,JPO&INPIT</p> |
