发明名称 METHOD OF FORMING FILM
摘要 Provided is a method of manufacturing a film, including: applying, onto a substrate, a photocurable composition containing a polymerizable monomer, a photopolymerization initiator, and a photosensitive gas generator that generates a gas through light stimulation to form an applied film; bringing a mold into contact with the applied film; irradiating the applied film with light through the mold to cure the applied film and to generate the gas in the applied film; and releasing the mold from the applied film after the irradiation of the applied film with the light to form a film (cured film) having a predetermined pattern shape on the substrate, in which in the irradiation of the applied film with the light, a reaction rate of a polymerization reaction of the polymerizable monomer in the applied film is higher than a reaction rate of a gas-generating reaction of the photosensitive gas generator in the applied film.
申请公布号 EP2758987(A4) 申请公布日期 2015.06.10
申请号 EP20120843863 申请日期 2012.10.19
申请人 CANON KABUSHIKI KAISHA 发明人 ITO, TOSHIKI;MATSUFUJI, NAOKO;KAWAHATA, KANAE
分类号 H01L21/027;B29C59/02 主分类号 H01L21/027
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