Method for performing hot water seal on electrostatic chuck

摘要

A method is provided for treating a bipolar ESC having a front surface and a back surface, the front surface including an anodized layer. The method includes eliminating the anodized layer, disposing a new anodized layer onto the front surface, and treating the new anodized layer with water to seal the new anodized layer.

主权项

1. A method of treating a bipolar ESC having an electrode with a front surface and a back surface, the front surface having an anodized layer, said method comprising: (a) eliminating the anodized layer; (b) disposing a new anodized layer onto the front surface; and (c) treating the new anodized layer with water to seal the new anodized layer, to obtain a refurbished ESC,
wherein said disposing a new anodized layer onto the front surface comprises anodizing the front surface to form the new anodized layer as a first layer of Al2O3 and a second layer of Al2O3 which are formed simultaneously, and the first layer has a greater density than the second layer, wherein the first layer is in direct contact with the front surface and the second layer is an exposed layer.